Fabrication and characterization of micromachined high-frequency tonpilz transducers derived by PZT thick films

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Fabrication and characterization of micromachined high-frequency tonpilz transducers derived by PZT thick films

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wetenschappelijk artikel

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наукова стаття, опублікована в березні 2005

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Fabrication and characterizati ...... ers derived by PZT thick films

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Fabrication and characterizati ...... ers derived by PZT thick films

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Fabrication and characterizati ...... ers derived by PZT thick films

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Fabrication and characterizati ...... ers derived by PZT thick films

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Fabrication and characterizati ...... ers derived by PZT thick films

@en

Fabrication and characterizati ...... ers derived by PZT thick films

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P1476

Fabrication and characterizati ...... ers derived by PZT thick films

@en

P2093

D.J. Van Tol

http://www.w3.org/2001/XMLSchema#string

J.M. Cannata

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K.K. Shung

http://www.w3.org/2001/XMLSchema#string

Qifa Zhou

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R.J. Meyer

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W.J. Hughes

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P304

350-357

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P31

scholarly article

P356

10.1109/TUFFC.2005.1417256

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P433

http://www.w3.org/2001/XMLSchema#string

P478

http://www.w3.org/2001/XMLSchema#string

P50

Susan Trolier-McKinstry

S Tadigadapa

P577

2005-03-01T00:00:00Z

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