Lead zirconate titanate MEMS accelerometer using interdigitated electrodes

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Lead zirconate titanate MEMS accelerometer using interdigitated electrodes

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http://www.wikidata.org/entity/Q60290613

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im Oktober 2003 veröffentlichter wissenschaftlicher Artikel

@de

wetenschappelijk artikel

@nl

наукова стаття, опублікована в жовтні 2003

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name

Lead zirconate titanate MEMS accelerometer using interdigitated electrodes

@en

Lead zirconate titanate MEMS accelerometer using interdigitated electrodes

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label

Lead zirconate titanate MEMS accelerometer using interdigitated electrodes

@en

Lead zirconate titanate MEMS accelerometer using interdigitated electrodes

@nl

prefLabel

Lead zirconate titanate MEMS accelerometer using interdigitated electrodes

@en

Lead zirconate titanate MEMS accelerometer using interdigitated electrodes

@nl

P1476

Lead zirconate titanate MEMS accelerometer using interdigitated electrodes

@en

P2093

Han Geun Yu

http://www.w3.org/2001/XMLSchema#string

K Deng

http://www.w3.org/2001/XMLSchema#string

L Zou

http://www.w3.org/2001/XMLSchema#string

R Wolf

http://www.w3.org/2001/XMLSchema#string

P304

26-35

http://www.w3.org/2001/XMLSchema#string

P31

scholarly article

P356

10.1016/S0924-4247(03)00271-1

http://www.w3.org/2001/XMLSchema#string

P433

http://www.w3.org/2001/XMLSchema#string

P478

107

http://www.w3.org/2001/XMLSchema#string

P50

Susan Trolier-McKinstry

S Tadigadapa

P577

2003-10-01T00:00:00Z

http://www.w3.org/2001/XMLSchema#dateTime

P921

accelerometer