Fabrication and performance of d 33 -mode lead-zirconate-titanate (PZT) MEMS accelerometers
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Fabrication and performance of d 33 -mode lead-zirconate-titanate (PZT) MEMS accelerometers
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wetenschappelijk artikel
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наукова стаття, опублікована в жовтні 2001
@uk
name
Fabrication and performance of ...... nate (PZT) MEMS accelerometers
@en
Fabrication and performance of d 33 -mode lead-zirconate-titanate
@nl
type
label
Fabrication and performance of ...... nate (PZT) MEMS accelerometers
@en
Fabrication and performance of d 33 -mode lead-zirconate-titanate
@nl
prefLabel
Fabrication and performance of ...... nate (PZT) MEMS accelerometers
@en
Fabrication and performance of d 33 -mode lead-zirconate-titanate
@nl
P2093
P356
P1476
Fabrication and performance of ...... nate (PZT) MEMS accelerometers
@en
P2093
Lichun Zou
Richard Wolf
Susan Troilier-McKinstry
P356
10.1117/12.443027
P50
P577
2001-10-01T00:00:00Z