Reliable integration of piezoelectric lead zirconate titanate with MEMS fabrication processes
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Reliable integration of piezoelectric lead zirconate titanate with MEMS fabrication processes
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наукова стаття, опублікована в жовтні 2001
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Reliable integration of piezoe ...... ith MEMS fabrication processes
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Reliable integration of piezoe ...... ith MEMS fabrication processes
@nl
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Reliable integration of piezoe ...... ith MEMS fabrication processes
@en
Reliable integration of piezoe ...... ith MEMS fabrication processes
@nl
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Reliable integration of piezoe ...... ith MEMS fabrication processes
@en
Reliable integration of piezoe ...... ith MEMS fabrication processes
@nl
P2093
P356
P1476
Reliable integration of piezoe ...... ith MEMS fabrication processes
@en
P2093
Frank T. Djuth
Qingqi Zhang
Steven J. Gross
Thomas N. Jackson
P356
10.1117/12.442988
P577
2001-10-02T00:00:00Z