Plasma-Etched Pattern Transfer of Sub-10 nm Structures Using a Metal-Organic Resist and Helium Ion Beam Lithography
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Plasma-Etched Pattern Transfer of Sub-10 nm Structures Using a Metal-Organic Resist and Helium Ion Beam Lithography
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Plasma-Etched Pattern Transfer ...... nd Helium Ion Beam Lithography
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type
label
Plasma-Etched Pattern Transfer ...... nd Helium Ion Beam Lithography
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prefLabel
Plasma-Etched Pattern Transfer ...... nd Helium Ion Beam Lithography
@en
P2093
P50
P1433
P1476
Plasma-Etched Pattern Transfer ...... nd Helium Ion Beam Lithography
@en
P2093
Alex Wertheim
Axel Scherer
Guy A DeRose
Hayden R Alty
Lucia De Rose
Matthew S Hunt
Stephen G Yeates
P304
P356
10.1021/ACS.NANOLETT.9B01911
P577
2019-08-27T00:00:00Z