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Q28817962-FAF3D028-F58C-46C4-A2EF-FF147A159764
Q28817962-FAF3D028-F58C-46C4-A2EF-FF147A159764
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http://www.wikidata.org/entity/statement/Q28817962-FAF3D028-F58C-46C4-A2EF-FF147A159764
Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
P2860
Q28817962-FAF3D028-F58C-46C4-A2EF-FF147A159764
BestRank
Statement
http://www.wikidata.org/entity/statement/Q28817962-FAF3D028-F58C-46C4-A2EF-FF147A159764
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c426b061d42cd2b703641fd6fc04238f25541cb9
P2860
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process