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Q29393418-785E4C09-0DB7-4F0C-976A-6447929A51F0
Q29393418-785E4C09-0DB7-4F0C-976A-6447929A51F0
BestRank
Statement
http://www.wikidata.org/entity/statement/Q29393418-785E4C09-0DB7-4F0C-976A-6447929A51F0
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
P356
Q29393418-785E4C09-0DB7-4F0C-976A-6447929A51F0
BestRank
Statement
http://www.wikidata.org/entity/statement/Q29393418-785E4C09-0DB7-4F0C-976A-6447929A51F0
rank
NormalRank
type
BestRank
Statement
wasDerivedFrom
10e97dc2d7726320309c7a12dce3e01197bbd708
2d1bdd9b9feb92a815e4f82bb6bb6070075af2cc
P356
10.1063/1.1940727
http://www.w3.org/2001/XMLSchema#string
P356
1.1940727