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Q34631388-5F30FBE8-7C75-49EC-953D-7145DE135183
Q34631388-5F30FBE8-7C75-49EC-953D-7145DE135183
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http://www.wikidata.org/entity/statement/Q34631388-5F30FBE8-7C75-49EC-953D-7145DE135183
Integration of solid-state nanopores in a 0.5 μm CMOS foundry process
P2860
Q34631388-5F30FBE8-7C75-49EC-953D-7145DE135183
BestRank
Statement
http://www.wikidata.org/entity/statement/Q34631388-5F30FBE8-7C75-49EC-953D-7145DE135183
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12177d704325203dab9bb2f8974c2996431d9a07
P2860
Fabrication of silicon nanopillar teradot arrays by electron-beam patterning for nanoimprint molds.