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Q35263762-3D5C004B-02CE-425F-8D62-F884C119A100
Q35263762-3D5C004B-02CE-425F-8D62-F884C119A100
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http://www.wikidata.org/entity/statement/Q35263762-3D5C004B-02CE-425F-8D62-F884C119A100
The impact of thickness and thermal annealing on refractive index for aluminum oxide thin films deposited by atomic layer deposition.
P2860
Q35263762-3D5C004B-02CE-425F-8D62-F884C119A100
BestRank
Statement
http://www.wikidata.org/entity/statement/Q35263762-3D5C004B-02CE-425F-8D62-F884C119A100
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52eef30f3396f7ea51126fba3e1e82246b517ae1
P2860
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process