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Etching (microfabrication)
Etching (microfabrication)
Concept
http://dbpedia.org/resource/Category:Etching_(microfabrication)
Deep reactive-ion etching
Etching (microfabrication)
Reactive-ion etching
Advanced silicon etching
Atomic layer etching
Buffered oxide etch
Dry etching
Wright etch
subject
Etching (microfabrication)
Concept
http://dbpedia.org/resource/Category:Etching_(microfabrication)
Wikipage page ID
14,641,299
http://www.w3.org/2001/XMLSchema#integer
Wikipage revision ID
474,557,107
http://www.w3.org/2001/XMLSchema#integer
type
Concept
label
Etching (microfabrication)
@en
sameAs
Q8424990
Q8424990
broader
Etching
Microtechnology
Semiconductor device fabrication
prefLabel
Etching (microfabrication)
@en
wasDerivedFrom
Category:Etching_(microfabrication)?oldid=474557107