Etching (microfabrication)
Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer undergoes many etching steps before it is complete. For many etch steps, part of the wafer is protected from the etchant by a "masking" material which resists etching. In some cases, the masking material is a photoresist which has been patterned using photolithography. Other situations require a more durable mask, such as silicon nitride.
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Etching (microfabrication)
Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer undergoes many etching steps before it is complete. For many etch steps, part of the wafer is protected from the etchant by a "masking" material which resists etching. In some cases, the masking material is a photoresist which has been patterned using photolithography. Other situations require a more durable mask, such as silicon nitride.
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Etching is used in microfabric ...... mask, such as silicon nitride.
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La gravure (aussi appelée parf ...... nombreuses étapes de gravure.
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Селективное травление (или изб ...... удаляет преимущественно AlAs).
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刻蚀(英语:etching)是半导体器件制造中利用化学途径选 ...... 蚀罩需要耐受某些化学物质,氮化硅就可以用来制造这样的“罩”。
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Etching is used in microfabric ...... mask, such as silicon nitride.
@en
La gravure (aussi appelée parf ...... nombreuses étapes de gravure.
@fr
Селективное травление (или изб ...... удаляет преимущественно AlAs).
@ru
刻蚀(英语:etching)是半导体器件制造中利用化学途径选 ...... 蚀罩需要耐受某些化学物质,氮化硅就可以用来制造这样的“罩”。
@zh
label
Etching (microfabrication)
@en
Gravure (micro-fabrication)
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Селективное травление
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刻蚀
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