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1
1.2213185
1.2213185
http://dx.doi.org/10.1063/1.2213185
Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography
P356
Q29999325-FC36B495-9120-47CD-8B10-999E54314364
P356
1.2213185
http://dx.doi.org/10.1063/1.2213185