Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography
about
Note: direct measurement of the point-to-point resolution for microns-thick specimens in the ultrahigh-voltage electron microscope.Analysis of nonlinear intensity attenuation in bright-field TEM images for correct 3D reconstruction of the density in micron-sized materials.Three-dimensional characterization of noble-metal nanoparticles and their assemblies by electron tomography.Electron Tomography: A Three-Dimensional Analytic Tool for Hard and Soft Materials Research.Nanoscale x-ray imaging of circuit features without wafer etching.Tilt-less 3-D electron imaging and reconstruction of complex curvilinear structures.Rapid alignment of nanotomography data using joint iterative reconstruction and reprojection.Three-dimensional imaging of pore structures inside low-κ dielectrics
P2860
Q33948482-4EDDF1F1-EFA0-4BCF-B123-BD8760ACBA3CQ35180431-80B5B4EA-A16F-49FC-85E1-7C0BD8F80046Q35226834-7744D7DD-7E01-4882-9612-606821A2195AQ35667804-46BB3899-4DDF-461C-84FC-C5A4FED99B34Q38650600-799933C1-39B3-4D70-BBB0-14BABB92172BQ41637001-B33C9B8A-8E55-4E94-BBA5-AC01544A3F44Q41717800-7F33414E-3886-446E-B83E-137DAA254DD4Q57310633-FA181FB6-730D-49E7-BC24-EC247CF87B84
P2860
Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography
description
2006 nî lūn-bûn
@nan
2006 թուականի Յունիսին հրատարակուած գիտական յօդուած
@hyw
2006 թվականի հունիսին հրատարակված գիտական հոդված
@hy
2006年の論文
@ja
2006年論文
@yue
2006年論文
@zh-hant
2006年論文
@zh-hk
2006年論文
@zh-mo
2006年論文
@zh-tw
2006年论文
@wuu
name
Three-dimensional imaging of n ...... herent bright field tomography
@ast
Three-dimensional imaging of n ...... herent bright field tomography
@en
type
label
Three-dimensional imaging of n ...... herent bright field tomography
@ast
Three-dimensional imaging of n ...... herent bright field tomography
@en
prefLabel
Three-dimensional imaging of n ...... herent bright field tomography
@ast
Three-dimensional imaging of n ...... herent bright field tomography
@en
P2093
P356
P1476
Three-dimensional imaging of n ...... herent bright field tomography
@en
P2093
David A. Muller
Lynne M. Gignac
Peter Ercius
P2860
P304
P356
10.1063/1.2213185
P407
P577
2006-06-12T00:00:00Z