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JMEMS.2010.2093567
JMEMS.2010.2093567
http://dx.doi.org/10.1109/JMEMS.2010.2093567
Fabrication of Capacitive Micromachined Ultrasonic Transducers via Local Oxidation and Direct Wafer Bonding
P356
Q57494104-E549FAAC-4921-4A5C-A93E-E0F06D8AC1C2
P356
JMEMS.2010.2093567
http://dx.doi.org/10.1109/JMEMS.2010.2093567