Fabrication of Capacitive Micromachined Ultrasonic Transducers via Local Oxidation and Direct Wafer Bonding
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Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging ApplicationsDevelopment of a Novel Transparent Flexible Capacitive Micromachined Ultrasonic Transducer.Recent advances in biomedical ultrasonic imaging techniques.Pull-In Analysis of the Flat Circular CMUT Cell Featuring Sealed Cavity
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Fabrication of Capacitive Micromachined Ultrasonic Transducers via Local Oxidation and Direct Wafer Bonding
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wetenschappelijk artikel
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наукова стаття, опублікована в лютому 2011
@uk
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Fabrication of Capacitive Micr ...... ation and Direct Wafer Bonding
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Fabrication of Capacitive Micr ...... ation and Direct Wafer Bonding
@nl
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Fabrication of Capacitive Micr ...... ation and Direct Wafer Bonding
@en
Fabrication of Capacitive Micr ...... ation and Direct Wafer Bonding
@nl
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Fabrication of Capacitive Micr ...... ation and Direct Wafer Bonding
@en
Fabrication of Capacitive Micr ...... ation and Direct Wafer Bonding
@nl
P2093
P1476
Fabrication of Capacitive Micr ...... ation and Direct Wafer Bonding
@en
P2093
Butrus T. Khuri-Yakub
Hyunjoo Lee
Mario Kupnik
P304
P356
10.1109/JMEMS.2010.2093567
P577
2011-02-01T00:00:00Z