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TUFFC.2005.1563267
TUFFC.2005.1563267
http://dx.doi.org/10.1109/TUFFC.2005.1563267
Capacitive micromachined ultrasonic transducers: fabrication technology.
P356
Q36389498-50A172B2-9F81-4234-89F4-A5CBB6238336
P356
TUFFC.2005.1563267
http://dx.doi.org/10.1109/TUFFC.2005.1563267