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Q36389498-50A172B2-9F81-4234-89F4-A5CBB6238336
Q36389498-50A172B2-9F81-4234-89F4-A5CBB6238336
BestRank
Statement
http://www.wikidata.org/entity/statement/Q36389498-50A172B2-9F81-4234-89F4-A5CBB6238336
Capacitive micromachined ultrasonic transducers: fabrication technology.
P356
Q36389498-50A172B2-9F81-4234-89F4-A5CBB6238336
BestRank
Statement
http://www.wikidata.org/entity/statement/Q36389498-50A172B2-9F81-4234-89F4-A5CBB6238336
rank
NormalRank
type
BestRank
Statement
wasDerivedFrom
d71544ac65780ea0652468229d7d703884b1a526
P356
10.1109/TUFFC.2005.1563267
http://www.w3.org/2001/XMLSchema#string
P356
TUFFC.2005.1563267