Optimizing process conditions for improved Hf 1−x Zr x O 2 ferroelectric capacitor performance
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Optimizing process conditions for improved Hf 1−x Zr x O 2 ferroelectric capacitor performance
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wetenschappelijk artikel
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наукова стаття, опублікована в червні 2017
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Optimizing process conditions ...... electric capacitor performance
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Optimizing process conditions ...... electric capacitor performance
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Optimizing process conditions ...... electric capacitor performance
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Optimizing process conditions ...... electric capacitor performance
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Optimizing process conditions for improved Hf1−xZrxO2 ferroelectric capacitor performance
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Optimizing process conditions ...... electric capacitor performance
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Optimizing process conditions ...... electric capacitor performance
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P2093
P1476
Optimizing process conditions ...... electric capacitor performance
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P2093
Claudia Richter
Franz P.G. Fengler
Terence Mittmann
Thomas Mikolajick
Uwe Schroeder
P356
10.1016/J.MEE.2017.04.031
P577
2017-06-01T00:00:00Z