Evaluation of experimental stress–strain dependence in thermally cycled Al thin film on Si(100)
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Evaluation of experimental stress–strain dependence in thermally cycled Al thin film on Si(100)
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name
Evaluation of experimental str ...... ally cycled Al thin film on Si
@nl
Evaluation of experimental str ...... cycled Al thin film on Si(100)
@en
type
label
Evaluation of experimental str ...... ally cycled Al thin film on Si
@nl
Evaluation of experimental str ...... cycled Al thin film on Si(100)
@en
prefLabel
Evaluation of experimental str ...... ally cycled Al thin film on Si
@nl
Evaluation of experimental str ...... cycled Al thin film on Si(100)
@en
P2093
P356
P1433
P1476
Evaluation of experimental str ...... cycled Al thin film on Si(100)
@en
P2093
C. Eisenmenger-Sittner
P356
10.1154/1.1815340
P577
2004-01-01T00:00:00Z