Gas-assisted electron-beam-induced nanopatterning of high-quality Si-based insulator
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Gas-assisted electron-beam-induced nanopatterning of high-quality Si-based insulator
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2014 nî lūn-bûn
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Gas-assisted electron-beam-induced nanopatterning of high-quality Si-based insulator
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type
label
Gas-assisted electron-beam-induced nanopatterning of high-quality Si-based insulator
@en
prefLabel
Gas-assisted electron-beam-induced nanopatterning of high-quality Si-based insulator
@en
P2093
P50
P356
P1433
P1476
Gas-assisted electron-beam-induced nanopatterning of high-quality Si-based insulator
@en
P2093
B N Costanzi
E Dan Dahlberg
J J L Mulders
Y G M Rikers
P304
P356
10.1088/0957-4484/25/15/155301
P577
2014-03-18T00:00:00Z