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Q87467538-AA4A3412-7FA7-4EC5-86AB-6075D7A6D471
Q87467538-AA4A3412-7FA7-4EC5-86AB-6075D7A6D471
BestRank
Statement
http://www.wikidata.org/entity/statement/Q87467538-AA4A3412-7FA7-4EC5-86AB-6075D7A6D471
Gas-assisted electron-beam-induced nanopatterning of high-quality Si-based insulator
P50
Q87467538-AA4A3412-7FA7-4EC5-86AB-6075D7A6D471
BestRank
Statement
http://www.wikidata.org/entity/statement/Q87467538-AA4A3412-7FA7-4EC5-86AB-6075D7A6D471
rank
NormalRank
type
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Statement
wasDerivedFrom
a6015a46f74f166bf93c6cc1b2073f66c53c5419
P1545
7
http://www.w3.org/2001/XMLSchema#string
P50
Andrei V Kabashin