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Q30485860-3F7253D7-2A66-4DA4-B8DD-9DC29B572A1E
Q30485860-3F7253D7-2A66-4DA4-B8DD-9DC29B572A1E
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Statement
http://www.wikidata.org/entity/statement/Q30485860-3F7253D7-2A66-4DA4-B8DD-9DC29B572A1E
Evaluation of wafer bonded CMUTs with rectangular membranes featuring high fill factor.
P2860
Q30485860-3F7253D7-2A66-4DA4-B8DD-9DC29B572A1E
BestRank
Statement
http://www.wikidata.org/entity/statement/Q30485860-3F7253D7-2A66-4DA4-B8DD-9DC29B572A1E
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bf20a3b86bd396d988b5d9d84d8e0ac34a4d10a5
P2860
Capacitive micromachined ultrasonic transducers: fabrication technology.