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1
Q33450689-514350F6-24A8-4F16-BFB0-089C4B60E7D6
Q33450689-514350F6-24A8-4F16-BFB0-089C4B60E7D6
BestRank
Statement
http://www.wikidata.org/entity/statement/Q33450689-514350F6-24A8-4F16-BFB0-089C4B60E7D6
Maskless lithography using silicon oxide etch-stop layer induced by megahertz repetition femtosecond laser pulses.
P50
Q33450689-514350F6-24A8-4F16-BFB0-089C4B60E7D6
BestRank
Statement
http://www.wikidata.org/entity/statement/Q33450689-514350F6-24A8-4F16-BFB0-089C4B60E7D6
rank
NormalRank
type
BestRank
Statement
P1545
2
http://www.w3.org/2001/XMLSchema#string
P1932
Krishnan Venkatakrishnan
http://www.w3.org/2001/XMLSchema#string
P50
Krishnan Venkatakrishnan