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Q33461030-9C561A20-13BE-4EA3-983C-9592690D16F3
Q33461030-9C561A20-13BE-4EA3-983C-9592690D16F3
BestRank
Statement
http://www.wikidata.org/entity/statement/Q33461030-9C561A20-13BE-4EA3-983C-9592690D16F3
Atmospheric pressure atomic layer deposition of Al₂O₃ using trimethyl aluminum and ozone.
P50
Q33461030-9C561A20-13BE-4EA3-983C-9592690D16F3
BestRank
Statement
http://www.wikidata.org/entity/statement/Q33461030-9C561A20-13BE-4EA3-983C-9592690D16F3
rank
NormalRank
type
BestRank
Statement
P1545
3
http://www.w3.org/2001/XMLSchema#string
P1932
Gregory N Parsons
http://www.w3.org/2001/XMLSchema#string
P50
Gregory N Parsons