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Q34072787-068BB330-8A1D-4F79-9774-97B2AA41C51B
Q34072787-068BB330-8A1D-4F79-9774-97B2AA41C51B
BestRank
Statement
http://www.wikidata.org/entity/statement/Q34072787-068BB330-8A1D-4F79-9774-97B2AA41C51B
Nano-artifact metrics based on random collapse of resist
P2860
Q34072787-068BB330-8A1D-4F79-9774-97B2AA41C51B
BestRank
Statement
http://www.wikidata.org/entity/statement/Q34072787-068BB330-8A1D-4F79-9774-97B2AA41C51B
rank
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wasDerivedFrom
4c45f2c6074ccac151bfd448db86575847f4e1eb
P2860
Sub-10-nm half-pitch electron-beam lithography by using poly(methyl methacrylate) as a negative resist