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Q37864562-83948826-925F-46CB-A35D-12B2A64FE109
Q37864562-83948826-925F-46CB-A35D-12B2A64FE109
BestRank
Statement
http://www.wikidata.org/entity/statement/Q37864562-83948826-925F-46CB-A35D-12B2A64FE109
Lithography, metrology and nanomanufacturing.
P2860
Q37864562-83948826-925F-46CB-A35D-12B2A64FE109
BestRank
Statement
http://www.wikidata.org/entity/statement/Q37864562-83948826-925F-46CB-A35D-12B2A64FE109
rank
NormalRank
type
BestRank
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wasDerivedFrom
5226f36b9bc682b8e88fe956d09d64742c968ec1
P2860
Directed self-assembly of block copolymers for nanolithography: fabrication of isolated features and essential integrated circuit geometries.