Directed self-assembly of block copolymers for nanolithography: fabrication of isolated features and essential integrated circuit geometries.
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25th anniversary article: ordered polymer structures for the engineering of photons and phonons.Directed self-assembly of block copolymer films on atomically-thin graphene chemical patternsSelective directed self-assembly of coexisting morphologies using block copolymer blendsNumerical Simulations of Directed Self-Assembly in Diblock Copolymer Films using Zone Annealing and Pattern Templating.Automated Defect and Correlation Length Analysis of Block Copolymer Thin Film Nanopatterns.Multilayer block copolymer meshes by orthogonal self-assemblyChemical interactions and their role in the microphase separation of block copolymer thin films.Lithography, metrology and nanomanufacturing.Micro-/nanostructured mechanical metamaterials.Directed self-assembly of block copolymers: a tutorial review of strategies for enabling nanotechnology with soft matter.Directed self-assembly of solvent-vapor-induced non-bulk block copolymer morphologies on nanopatterned substrates.Host-guest self-assembly in block copolymer blends.Large-scale parallel arrays of silicon nanowires via block copolymer directed self-assembly.Sacrificial-post templating method for block copolymer self-assembly.Enabling complex nanoscale pattern customization using directed self-assembly.Simultaneous fabrication of line and dot dual nanopatterns using miktoarm block copolymer with photocleavable linker.Designing an ordered template of cylindrical arrays based on a simple flat plate confinement of block copolymers: a coarse-grained molecular dynamics study.Tetragonal phase of cylinders self-assembled from binary blends of AB diblock and (A'B)n star copolymers.Carbohydrate-based block copolymer systems: directed self-assembly for nanolithography applications.Influence of topographically patterned angled guidelines on directed self-assembly of block copolymers.Three-dimensional inverse design of nanopatterns with block copolymers and homopolymers.Directed self assembly of block copolymers using chemical patterns with sidewall guiding lines, backfilled with random copolymer brushes.Extraordinary boundary morphologies of large-scale ordered domains of spheres in thin films of a narrowly dispersed diblock copolymer via thermodynamic control.Hierarchical nanostructures of diblock copolymer thin films directed by a saw-toothed substrate.Topcoat-Assisted Perpendicular and Straightly Parallel Coexisting Orientations of Block Copolymer Films.Directed self-assembly with sub-100 degrees Celsius processing temperature, sub-10 nanometer resolution, and sub-1 minute assembly time.Defect removal in the course of directed self-assembly is facilitated in the vicinity of the order-disorder transition.Negative-tone block copolymer lithography by in situ surface chemical modification.Design rules for self-assembled block copolymer patterns using tiled templates.Thin film knitting pattern morphology from a miktoarm star terpolymer.Kinetics of lamellar formation on sparsely stripped patterns.Hierarchical Manipulation of Block Copolymer Patterns on 3D Topographic Substrates: Beyond Graphoepitaxy.Materials self-assembly and fabrication in confined spacesDirected self-assembly of a two-state block copolymer system
P2860
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P2860
Directed self-assembly of block copolymers for nanolithography: fabrication of isolated features and essential integrated circuit geometries.
description
2007 nî lūn-bûn
@nan
2007年の論文
@ja
2007年学术文章
@wuu
2007年学术文章
@zh
2007年学术文章
@zh-cn
2007年学术文章
@zh-hans
2007年学术文章
@zh-my
2007年学术文章
@zh-sg
2007年學術文章
@yue
2007年學術文章
@zh-hant
name
Directed self-assembly of bloc ...... integrated circuit geometries.
@en
Directed self-assembly of bloc ...... integrated circuit geometries.
@nl
type
label
Directed self-assembly of bloc ...... integrated circuit geometries.
@en
Directed self-assembly of bloc ...... integrated circuit geometries.
@nl
prefLabel
Directed self-assembly of bloc ...... integrated circuit geometries.
@en
Directed self-assembly of bloc ...... integrated circuit geometries.
@nl
P2093
P356
P1433
P1476
Directed self-assembly of bloc ...... integrated circuit geometries.
@en
P2093
Chi-Chun Liu
Guoliang Liu
Huiman Kang
Juan J de Pablo
Kostas Ch Daoulas
Mark P Stoykovich
Paul F Nealey
P304
P356
10.1021/NN700164P
P407
P577
2007-10-01T00:00:00Z