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Q41809887-A50A0777-64A3-446B-ABA7-F326145125B2
Q41809887-A50A0777-64A3-446B-ABA7-F326145125B2
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http://www.wikidata.org/entity/statement/Q41809887-A50A0777-64A3-446B-ABA7-F326145125B2
Optimized piranha etching process for SU8-based MEMS and MOEMS construction.
P2860
Q41809887-A50A0777-64A3-446B-ABA7-F326145125B2
BestRank
Statement
http://www.wikidata.org/entity/statement/Q41809887-A50A0777-64A3-446B-ABA7-F326145125B2
rank
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0a9c21445b7bf7f45c781c4760751160e4c6b2fb
P2860
Fabrication of SU-8 multilayer microstructures based on successive CMOS compatible adhesive bonding and releasing steps.