awgldk
/
wikidata
/
Login
Register
TriplyDB
Wikidata
Browser
Triples
Insights
Schema
BETA
Class frequency
Class hierarchy
SPARQL
GraphQL
BETA
Graphs
1
Q44870275-232FC384-F067-4CAC-99B3-1F02F9A1985F
Q44870275-232FC384-F067-4CAC-99B3-1F02F9A1985F
BestRank
Statement
http://www.wikidata.org/entity/statement/Q44870275-232FC384-F067-4CAC-99B3-1F02F9A1985F
In situ auger electron spectroscopy study of atomic layer deposition: growth initiation and interface formation reactions during ruthenium ALD on Si-H, SiO2, and HfO2 surfaces.
P356
Q44870275-232FC384-F067-4CAC-99B3-1F02F9A1985F
BestRank
Statement
http://www.wikidata.org/entity/statement/Q44870275-232FC384-F067-4CAC-99B3-1F02F9A1985F
rank
NormalRank
type
BestRank
Statement
wasDerivedFrom
7559984d01a97dc688f471fa66efc53ca70d4ca6
P356
10.1021/LA061898U
http://www.w3.org/2001/XMLSchema#string
P356
LA061898U