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Q44870275-46A49BFC-6648-4105-B0CB-1AAB43FD672E
Q44870275-46A49BFC-6648-4105-B0CB-1AAB43FD672E
BestRank
Statement
http://www.wikidata.org/entity/statement/Q44870275-46A49BFC-6648-4105-B0CB-1AAB43FD672E
In situ auger electron spectroscopy study of atomic layer deposition: growth initiation and interface formation reactions during ruthenium ALD on Si-H, SiO2, and HfO2 surfaces.
P50
Q44870275-46A49BFC-6648-4105-B0CB-1AAB43FD672E
BestRank
Statement
http://www.wikidata.org/entity/statement/Q44870275-46A49BFC-6648-4105-B0CB-1AAB43FD672E
rank
NormalRank
type
BestRank
Statement
wasDerivedFrom
7559984d01a97dc688f471fa66efc53ca70d4ca6
P1545
4
http://www.w3.org/2001/XMLSchema#string
P50
Gregory N Parsons