awgldk
/
wikidata
/
Login
Register
TriplyDB
Wikidata
Browser
Table
SPARQL
Graphs
1
1
Services
1
1
Assets
0
0
Insights
Schema
BETA
Class frequency
Class hierarchy
Q46801353-368E39FC-7FB2-4285-8CE5-389879F5048A
Q46801353-368E39FC-7FB2-4285-8CE5-389879F5048A
BestRank
Statement
http://www.wikidata.org/entity/statement/Q46801353-368E39FC-7FB2-4285-8CE5-389879F5048A
Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2.
P2860
Q46801353-368E39FC-7FB2-4285-8CE5-389879F5048A
BestRank
Statement
http://www.wikidata.org/entity/statement/Q46801353-368E39FC-7FB2-4285-8CE5-389879F5048A
rank
NormalRank
type
BestRank
Statement
wasDerivedFrom
ceab6221f2e47575822abf53d77b31d0337617df
P2860
Atomic layer deposition of oxide thin films with metal alkoxides as oxygen sources