Atomic layer deposition of oxide thin films with metal alkoxides as oxygen sources
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Recent Development of Advanced Electrode Materials by Atomic Layer Deposition for Electrochemical Energy StorageStepwise mechanism and H2O-assisted hydrolysis in atomic layer deposition of SiO2 without a catalystAtomic Layer Deposition of a Silver Nanolayer on Advanced Titanium Orthopedic Implants Inhibits Bacterial Colonization and Supports Vascularized de Novo Bone Ingrowth.Atomic layer deposition of nanostructured materials for energy and environmental applications.A mechanical and electrical transistor structure (METS) with a sub-2 nm nanogap for effective voltage scaling.Mechanistic Aspects in the Formation, Growth and Surface Functionalization of Metal Oxide Nanoparticles in Organic Solvents.Atomic structure and electronic properties of MgO grain boundaries in tunnelling magnetoresistive devices.Rapid atomic layer deposition of silica nanolaminates: synergistic catalysis of Lewis/Brønsted acid sites and interfacial interactions.Atomic imaging and modeling of H2O2(g) surface passivation, functionalization, and atomic layer deposition nucleation on the Ge(100) surface.An atomic layer deposition chamber for in situ x-ray diffraction and scattering analysis.Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2.Interfacial catalysis in and initial reaction mechanism of Al2O3 films fabricated by atomic layer deposition using non-hydrolytic sol-gel chemistry.Atomic layer deposition of diisopropylaminosilane on WO3(001) and W(110): a density functional theory study.Superior Photostability and Photocatalytic Activity of ZnO Nanoparticles Coated with Ultrathin TiO2 Layers through Atomic-Layer Deposition.Biofilm prevention on cochlear implants.Structural evolution of platinum thin films grown by atomic layer depositionNondestructive diagnostics of high-κ dielectrics for advanced electronic devicesAtomic Layer Deposition and Characterization of Aluminum Silicate Thin Films for Optical ApplicationsEffect of Weave Geometry on Surface Energy Modification of Textile Materials via Atomic Layer DepositionStructural diversity in metal–organic nanoparticles based on iron isopropoxide treated ligninMetal-Insulator Transition in ALD VO2Ultrathin Films and Nanoparticles: Morphological Control(Ta1−xNbx)2O5 films produced by atomic layer deposition: Temperature dependent dielectric spectroscopy and room-temperature I–V characteristicsSol-Gel Chemistry and Atomic Layer DepositionNon-aqueous sol–gel routes applied to atomic layer deposition of oxidesControlling the Composition of Doped Materials by ALD: A Case Study for Al-Doped TiO[sub 2] Films
P2860
Q28596450-5AAE9040-7E65-415E-AEFC-9860645A6160Q35435133-FF5C3C0E-E088-44FD-A870-461516FA0AB3Q36315845-A74D5018-5133-4D51-B7BF-9F0743F4438FQ37978816-220512FC-CB79-43B9-BC15-462D05E7C863Q38437616-373B5D71-FF0C-4CE8-AA5F-AD64450E3292Q39219637-3AB89789-A9C1-4EA1-9B21-86CF02FAA768Q41986323-88DD0B6F-5C6C-4BCE-A2D4-C52DEF0E79D2Q43435043-DBED3A1C-92BC-43E8-9FCD-F692CE92DEAEQ45053802-C97E249E-8F14-4836-8C5F-0D600C2272A8Q46388271-5F7A78DF-5183-4F44-BF9B-271ED6B193DCQ46801353-368E39FC-7FB2-4285-8CE5-389879F5048AQ48053333-57E413E9-D9AD-47DA-A673-1C4004862422Q50617752-BCA7826F-D16C-40BF-895E-E100FED826C5Q51648865-A719289E-0952-4CC5-AA54-059550E8D914Q53587712-4A14240D-F7B5-4837-A1CF-5F94F4346649Q55014288-D358F2FD-1730-4D36-A142-DB496958B9DFQ57387437-8204CDD8-47EE-47E6-B97F-C321F041AA82Q57397883-28F19EF4-D403-4921-9F2B-5D866349237DQ57438681-57EEFBBC-CF26-4722-B40A-0B948CD46FC7Q57695324-06FC125A-E266-4468-84B2-C2BAFC2F9FCCQ57881722-DC453471-C518-404E-A074-4D45D8CC7B2AQ57949979-8754C655-A856-4030-A694-ADB9254DB3FCQ58208246-FD554EA5-9ADB-4F4D-AD28-CC9AFA89855CQ58208337-34AED07F-746D-4A70-B1ED-D250567BA4A2Q58886093-CAA4418D-105F-4653-991A-2A6AFA18ABE1
P2860
Atomic layer deposition of oxide thin films with metal alkoxides as oxygen sources
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2000 nî lūn-bûn
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2000年の論文
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2000年学术文章
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2000年学术文章
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2000年学术文章
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2000年学术文章
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2000年學術文章
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2000年學術文章
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name
Atomic layer deposition of oxide thin films with metal alkoxides as oxygen sources
@en
type
label
Atomic layer deposition of oxide thin films with metal alkoxides as oxygen sources
@en
prefLabel
Atomic layer deposition of oxide thin films with metal alkoxides as oxygen sources
@en
P2093
P50
P1433
P1476
Atomic layer deposition of oxide thin films with metal alkoxides as oxygen sources
@en
P2093
P304
P356
10.1126/SCIENCE.288.5464.319
P407
P577
2000-04-01T00:00:00Z