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Q57397812-79657429-D209-462E-A116-1286F3C24198
Q57397812-79657429-D209-462E-A116-1286F3C24198
BestRank
Statement
http://www.wikidata.org/entity/statement/Q57397812-79657429-D209-462E-A116-1286F3C24198
Alkylsilyl compounds as enablers of atomic layer deposition: analysis of (Et3Si)3As through the GaAs process
P50
Q57397812-79657429-D209-462E-A116-1286F3C24198
BestRank
Statement
http://www.wikidata.org/entity/statement/Q57397812-79657429-D209-462E-A116-1286F3C24198
rank
NormalRank
type
BestRank
Statement
P1545
2
http://www.w3.org/2001/XMLSchema#string
P1932
Timo Hatanpää
http://www.w3.org/2001/XMLSchema#string
P50
Timo Hatanpää