Alkylsilyl compounds as enablers of atomic layer deposition: analysis of (Et3Si)3As through the GaAs process
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Alkylsilyl compounds as enablers of atomic layer deposition: analysis of (Et3Si)3As through the GaAs process
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wetenschappelijk artikel
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наукова стаття, опублікована у 2016
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Alkylsilyl compounds as enable ...... i)3As through the GaAs process
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Alkylsilyl compounds as enablers of atomic layer deposition: analysis of
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Alkylsilyl compounds as enable ...... i)3As through the GaAs process
@en
Alkylsilyl compounds as enablers of atomic layer deposition: analysis of
@nl
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Alkylsilyl compounds as enable ...... i)3As through the GaAs process
@en
Alkylsilyl compounds as enablers of atomic layer deposition: analysis of
@nl
P2860
P50
P356
P1476
Alkylsilyl compounds as enable ...... i)3As through the GaAs process
@en
P2093
Tiina Sarnet
P2860
P304
P356
10.1039/C5TC03079J
P577
2016-01-01T00:00:00Z