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Q89889768-06B76B0E-BEC7-434D-AD4A-944AE1AC0546
Q89889768-06B76B0E-BEC7-434D-AD4A-944AE1AC0546
BestRank
Statement
http://www.wikidata.org/entity/statement/Q89889768-06B76B0E-BEC7-434D-AD4A-944AE1AC0546
Metal assisted chemical etching of silicon in the gas phase: a nanofabrication platform for X-ray optics
P577
Q89889768-06B76B0E-BEC7-434D-AD4A-944AE1AC0546
BestRank
Statement
http://www.wikidata.org/entity/statement/Q89889768-06B76B0E-BEC7-434D-AD4A-944AE1AC0546
rank
NormalRank
type
BestRank
Statement
wasDerivedFrom
20f14659d7478efa9f78934abbbe967f8891ed22
P577
2020-02-26T00:00:00Z
http://www.w3.org/2001/XMLSchema#dateTime
P577
2c8bbe15e629c2fc1c86d342012b008d