Metal assisted chemical etching of silicon in the gas phase: a nanofabrication platform for X-ray optics
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Metal assisted chemical etching of silicon in the gas phase: a nanofabrication platform for X-ray optics
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Metal assisted chemical etchin ...... tion platform for X-ray optics
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Metal assisted chemical etchin ...... tion platform for X-ray optics
@en
prefLabel
Metal assisted chemical etchin ...... tion platform for X-ray optics
@en
P2093
P50
P356
P1476
Metal assisted chemical etchin ...... tion platform for X-ray optics
@en
P2093
Joan Vila-Comamala
Konstantins Jefimovs
Li-Ting Tseng
P356
10.1039/C9NH00709A
P577
2020-02-26T00:00:00Z