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Q89889768
Q89889768
Dataset
https://www.wikidata.org/wiki/Special:EntityData/Q89889768
Q89889768
Dataset
https://www.wikidata.org/wiki/Special:EntityData/Q89889768
about
Metal assisted chemical etching of silicon in the gas phase: a nanofabrication platform for X-ray optics
dateModified
2020-05-09T09:57:24Z
http://www.w3.org/2001/XMLSchema#dateTime
version
1,177,244,219
http://www.w3.org/2001/XMLSchema#integer
identifiers
2
http://www.w3.org/2001/XMLSchema#integer
sitelinks
0
http://www.w3.org/2001/XMLSchema#integer
statements
12
http://www.w3.org/2001/XMLSchema#integer
type
Dataset