Scanning electron microscope measurement of width and shape of 10nm patterned lines using a JMONSEL-modeled library.
about
Quantum-trajectory Monte Carlo method for study of electron-crystal interaction in STEM.Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression.Comparison of Electron Imaging Modes for Dimensional Measurements in the Scanning Electron Microscope.Advancing X-ray scattering metrology using inverse genetic algorithms.Virtual rough samples to test 3D nanometer-scale scanning electron microscopy stereo photogrammetry.Enabling Quantitative Optical Imaging for In-die-capable Critical Dimension Targets.Three-Dimensional (3D) Nanometrology Based on Scanning Electron Microscope (SEM) Stereophotogrammetry.Strain measurement of 3D structured nanodevices by EBSD.
P2860
Q35665572-6598F385-8141-48A5-BC85-FD74B18AD58AQ35872766-BF0565FB-AAAF-43CB-AECB-FF67B418C33EQ36084174-D32BBDB5-670E-4D2E-8184-1FB493AC5C78Q37188643-579875AF-4D42-498B-862C-80CA5C143FCDQ41082042-B566C081-9362-4F34-A0B4-BAFE3ADE4404Q41136860-9937F470-3210-480C-B167-629EDC315D10Q47684445-E2E76286-039D-46FF-A7AC-0A7091AE2AB5Q50235541-31F573F5-8525-41B9-A407-4E5552D65C70
P2860
Scanning electron microscope measurement of width and shape of 10nm patterned lines using a JMONSEL-modeled library.
description
2015 nî lūn-bûn
@nan
2015年の論文
@ja
2015年論文
@yue
2015年論文
@zh-hant
2015年論文
@zh-hk
2015年論文
@zh-mo
2015年論文
@zh-tw
2015年论文
@wuu
2015年论文
@zh
2015年论文
@zh-cn
name
Scanning electron microscope m ...... ing a JMONSEL-modeled library.
@ast
Scanning electron microscope m ...... ing a JMONSEL-modeled library.
@en
type
label
Scanning electron microscope m ...... ing a JMONSEL-modeled library.
@ast
Scanning electron microscope m ...... ing a JMONSEL-modeled library.
@en
prefLabel
Scanning electron microscope m ...... ing a JMONSEL-modeled library.
@ast
Scanning electron microscope m ...... ing a JMONSEL-modeled library.
@en
P2093
P1433
P1476
Scanning electron microscope m ...... sing a JMONSEL-modeled library
@en
P2093
P356
10.1016/J.ULTRAMIC.2015.01.004
P50
P577
2015-02-20T00:00:00Z