about
description
article
@en
wetenschappelijk artikel
@nl
наукова стаття, опублікована в липні 2012
@uk
name
Compositional depth profiling of TaCN thin films
@en
Compositional depth profiling of TaCN thin films
@nl
type
label
Compositional depth profiling of TaCN thin films
@en
Compositional depth profiling of TaCN thin films
@nl
prefLabel
Compositional depth profiling of TaCN thin films
@en
Compositional depth profiling of TaCN thin films
@nl
P2093
P356
P1476
Compositional depth profiling of TaCN thin films
@en
P2093
Alexis Franquet
Bert Brijs
Johan Meersschaut
Jorge A. Kittl
Simon Burgess
Sven Van Elshocht
Thierry Conard
Thomas Witters
Wilfried Vandervorst
P304
P356
10.1116/1.4726261
P577
2012-07-01T00:00:00Z