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1
Q62593086-227560C0-3480-4290-9874-5D18544592CA
Q62593086-227560C0-3480-4290-9874-5D18544592CA
BestRank
Statement
http://www.wikidata.org/entity/statement/Q62593086-227560C0-3480-4290-9874-5D18544592CA
Compositional depth profiling of TaCN thin films
P50
Q62593086-227560C0-3480-4290-9874-5D18544592CA
BestRank
Statement
http://www.wikidata.org/entity/statement/Q62593086-227560C0-3480-4290-9874-5D18544592CA
rank
NormalRank
type
BestRank
Statement
P1545
1
http://www.w3.org/2001/XMLSchema#string
P1932
Christoph Adelmann
http://www.w3.org/2001/XMLSchema#string
P50
Christoph Adelmann