3D microfabrication
Acoustic droplet ejection
Bio-MEMS
Bond characterization
DNA microarray
Deep reactive-ion etching
Deformable mirror
Digital micromirror device
Dip-pen nanolithography
Etching (microfabrication)
GP5 chip
Industrial computed tomography
Interdigital transducer
Ion track
LIGA
LOCOS
Lift-off (microtechnology)
Advanced silicon etchingBulk micromachiningComb driveCoordinatographCrossover switchDirected assembly of micro- and nano-structuresDry etchingElectrostatic–pneumatic activationEnergy harvestingHARMSTHybrid Insect Micro-Electro-Mechanical SystemsHydrogen sensorIntelligent Small World Autonomous Robots for Micro-manipulationLab on a Chip (journal)MEMS sensor generationsMEMS testingMEMS thermal actuatorMask inspectionMicro-loop heat pipeMicro-opto-mechanical systemsMicro heat exchangerMicro power sourceMicro process engineering
subject
related
Wikipage page ID
14,631,447
Wikipage revision ID
548,610,755
type
label
Microtechnology
@en
prefLabel
Microtechnology
@en