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S00542-013-1816-X
S00542-013-1816-X
http://dx.doi.org/10.1007/S00542-013-1816-X
Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process
P356
Q56212948-863E1C77-B02C-4708-B760-569CB5BB4574
P356
S00542-013-1816-X
http://dx.doi.org/10.1007/S00542-013-1816-X