Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process
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Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process
description
im Mai 2013 veröffentlichter wissenschaftlicher Artikel
@de
wetenschappelijk artikel
@nl
наукова стаття, опублікована в травні 2013
@uk
name
Fabrication of electrostatic M ...... y-film-transfer-to-PCB process
@en
Fabrication of electrostatic M ...... y-film-transfer-to-PCB process
@nl
type
label
Fabrication of electrostatic M ...... y-film-transfer-to-PCB process
@en
Fabrication of electrostatic M ...... y-film-transfer-to-PCB process
@nl
prefLabel
Fabrication of electrostatic M ...... y-film-transfer-to-PCB process
@en
Fabrication of electrostatic M ...... y-film-transfer-to-PCB process
@nl
P2093
P1476
Fabrication of electrostatic M ...... y-film-transfer-to-PCB process
@en
P2093
Adisorn Tuantranont
Anurat Wisitsoraat
Ditsayuth Phokaratkul
Komgrit Leksakul
Pongsak Kerdlapee
Rungreung Phatthanakun
P2888
P304
P356
10.1007/S00542-013-1816-X
P577
2013-05-21T00:00:00Z