The design and analysis of beam-membrane structure sensors for micro-pressure measurement.
about
Design of a MEMS piezoresistive differential pressure sensor with small thermal hysteresis for air data modules.Annularly grooved membrane combined with rood beam piezoresistive pressure sensor for low pressure applications.The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure SensorApplication and Optimization of Stiffness Abruption Structures for Pressure Sensors with High Sensitivity and Anti-Overload Ability.Design Optimization and Fabrication of a Novel Structural SOI Piezoresistive Pressure Sensor with High Accuracy.Geometry optimization for micro-pressure sensor considering dynamic interference.Incorporation of beams into bossed diaphragm for a high sensitivity and overload micro pressure sensor.
P2860
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P2860
The design and analysis of beam-membrane structure sensors for micro-pressure measurement.
description
2012 nî lūn-bûn
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2012年の論文
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2012年学术文章
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2012年学术文章
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2012年学术文章
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2012年学术文章
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2012年学术文章
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name
The design and analysis of bea ...... or micro-pressure measurement.
@en
The design and analysis of bea ...... or micro-pressure measurement.
@nl
type
label
The design and analysis of bea ...... or micro-pressure measurement.
@en
The design and analysis of bea ...... or micro-pressure measurement.
@nl
prefLabel
The design and analysis of bea ...... or micro-pressure measurement.
@en
The design and analysis of bea ...... or micro-pressure measurement.
@nl
P2093
P356
P1476
The design and analysis of bea ...... or micro-pressure measurement.
@en
P2093
Yulong Zhao
Zhuangde Jiang
P304
P356
10.1063/1.3702809
P577
2012-04-01T00:00:00Z