Incorporation of beams into bossed diaphragm for a high sensitivity and overload micro pressure sensor.
about
Thermal-Performance Instability in Piezoresistive Sensors: Inducement and ImprovementAnnularly grooved membrane combined with rood beam piezoresistive pressure sensor for low pressure applications.Application and Optimization of Stiffness Abruption Structures for Pressure Sensors with High Sensitivity and Anti-Overload Ability.Design Optimization and Fabrication of a Novel Structural SOI Piezoresistive Pressure Sensor with High Accuracy.
P2860
Incorporation of beams into bossed diaphragm for a high sensitivity and overload micro pressure sensor.
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2013 nî lūn-bûn
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Incorporation of beams into bo ...... verload micro pressure sensor.
@en
Incorporation of beams into bo ...... verload micro pressure sensor.
@nl
type
label
Incorporation of beams into bo ...... verload micro pressure sensor.
@en
Incorporation of beams into bo ...... verload micro pressure sensor.
@nl
prefLabel
Incorporation of beams into bo ...... verload micro pressure sensor.
@en
Incorporation of beams into bo ...... verload micro pressure sensor.
@nl
P2093
P356
P1476
Incorporation of beams into bo ...... verload micro pressure sensor.
@en
P2093
Yulong Zhao
Zhongliang Yu
Zhuangde Jiang
P2860
P304
P356
10.1063/1.4775603
P577
2013-01-01T00:00:00Z