Atomistic kinetic Monte Carlo study of atomic layer deposition derived from density functional theory.
about
A DFT study of H-dissolution into the bulk of a crystalline Ni(111) surface: a chemical identifier for the reaction kinetics.Modeling Mechanism and Growth Reactions for New Nanofabrication Processes by Atomic Layer Deposition.Atomic and molecular layer deposition: off the beaten track.First principles study of the atomic layer deposition of alumina by TMA-H2O-process.Cooperation between adsorbates accounts for the activation of atomic layer deposition reactions.Continuous and ultrathin platinum films on graphene using atomic layer deposition: a combined computational and experimental study.Self-cleaning and surface chemical reactions during hafnium dioxide atomic layer deposition on indium arsenide.Studying chemical vapor deposition processes with theoretical chemistry
P2860
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P2860
Atomistic kinetic Monte Carlo study of atomic layer deposition derived from density functional theory.
description
2013 nî lūn-bûn
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2013年の論文
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2013年学术文章
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2013年学术文章
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2013年学术文章
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2013年学术文章
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name
Atomistic kinetic Monte Carlo ...... rom density functional theory.
@en
Atomistic kinetic Monte Carlo ...... rom density functional theory.
@nl
type
label
Atomistic kinetic Monte Carlo ...... rom density functional theory.
@en
Atomistic kinetic Monte Carlo ...... rom density functional theory.
@nl
prefLabel
Atomistic kinetic Monte Carlo ...... rom density functional theory.
@en
Atomistic kinetic Monte Carlo ...... rom density functional theory.
@nl
P2860
P356
P1476
Atomistic kinetic Monte Carlo ...... from density functional theory
@en
P2093
Mahdi Shirazi
Simon D Elliott
P2860
P304
P356
10.1002/JCC.23491
P577
2013-11-19T00:00:00Z