Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation
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Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation
description
im April 2014 veröffentlichter wissenschaftlicher Artikel
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scientific article published on 04 March 2014
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wetenschappelijk artikel
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наукова стаття, опублікована у квітні 2014
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name
Enabling electromechanical tra ...... focused ion beam implantation
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Enabling electromechanical tra ...... focused ion beam implantation
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type
label
Enabling electromechanical tra ...... focused ion beam implantation
@en
Enabling electromechanical tra ...... focused ion beam implantation
@nl
prefLabel
Enabling electromechanical tra ...... focused ion beam implantation
@en
Enabling electromechanical tra ...... focused ion beam implantation
@nl
P50
P356
P1433
P1476
Enabling electromechanical tra ...... focused ion beam implantation
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P2093
M Gerbolés
P304
P356
10.1088/0957-4484/25/13/135302
P407
P577
2014-03-04T00:00:00Z