Analysis of phase drift based on uncertainty analysis in electro-thermal excited MEMS resonant sensor

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Analysis of phase drift based on uncertainty analysis in electro-thermal excited MEMS resonant sensor

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im Mai 2016 veröffentlichter wissenschaftlicher Artikel

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wetenschappelijk artikel

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наукова стаття, опублікована в травні 2016

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Analysis of phase drift based ...... l excited MEMS resonant sensor

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Analysis of phase drift based ...... l excited MEMS resonant sensor

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Analysis of phase drift based ...... l excited MEMS resonant sensor

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Analysis of phase drift based ...... l excited MEMS resonant sensor

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Analysis of phase drift based ...... l excited MEMS resonant sensor

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Analysis of phase drift based ...... l excited MEMS resonant sensor

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P1476

Analysis of phase drift based ...... l excited MEMS resonant sensor

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P2093

Huichao Shi

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Shangchun Fan

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Yuwen Zhang

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P2860

The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon Substrate

Uncertainty Analysis of Solid-Liquid-Vapor Phase Change of a Metal Particle Subject to Nanosecond Laser Heating

Design and optimization based on uncertainty analysis in electro-thermal excited MEMS resonant sensor

P2888

s00542-016-2962-8

P304

2043-2053

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P31

scholarly article

P356

10.1007/S00542-016-2962-8

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P433

http://www.w3.org/2001/XMLSchema#string

P478

http://www.w3.org/2001/XMLSchema#string

P577

2016-05-12T00:00:00Z

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