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Q57606862-C7558F2A-1075-4DA0-8480-CC68EA4CD381
Q57606862-C7558F2A-1075-4DA0-8480-CC68EA4CD381
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http://www.wikidata.org/entity/statement/Q57606862-C7558F2A-1075-4DA0-8480-CC68EA4CD381
Analysis of phase drift based on uncertainty analysis in electro-thermal excited MEMS resonant sensor
P2860
Q57606862-C7558F2A-1075-4DA0-8480-CC68EA4CD381
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http://www.wikidata.org/entity/statement/Q57606862-C7558F2A-1075-4DA0-8480-CC68EA4CD381
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4aa1d5b99e2b177261f6a138bb451959f1ff1638
P2860
Design and optimization based on uncertainty analysis in electro-thermal excited MEMS resonant sensor