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Q48114801-F071403A-26BA-4D5F-9CE8-FF124CAF518B
Q48114801-F071403A-26BA-4D5F-9CE8-FF124CAF518B
BestRank
Statement
http://www.wikidata.org/entity/statement/Q48114801-F071403A-26BA-4D5F-9CE8-FF124CAF518B
Design Optimization and Fabrication of a Novel Structural SOI Piezoresistive Pressure Sensor with High Accuracy.
P2860
Q48114801-F071403A-26BA-4D5F-9CE8-FF124CAF518B
BestRank
Statement
http://www.wikidata.org/entity/statement/Q48114801-F071403A-26BA-4D5F-9CE8-FF124CAF518B
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Statement
wasDerivedFrom
6e1f30f85d06be6132ee69180a174b2fab25ad64
P2860
Incorporation of beams into bossed diaphragm for a high sensitivity and overload micro pressure sensor.